Products
The Sensilica® family of miniature pressure sensor devices are ideal for original equipment manufacturers seeking low cost, high-performance absolute pressure sensing in an extraordinarily small form factor. The Sensilica® family of pressure sensors are extremely small (0.8x0.8x0.4mm) MEMS based piezoresistive pressure sensing devices that have been designed to provide the highest level of performance for die of this size.  Sensilica®  is an all-silicon device and thus does not use wafer bonding to create the pressure reference cavity. This benefit reduces size, cost and improves reliability compared to other sensors on the market that can leak due to bonding failures. In addition, Sensilica®  has the highest burst pressure (>10x) among the MEMS piezoresistive pressure sensors available on market today.
 
 
 
Sensilica® Pressure Sensor Products
 
 
This sensor is perfect for high volume applications where cost and performance are critical factors, such as tire pressure monitoring and disposable pressure sensing. The current Sensilica® pressure sensor die are uncompensated absolute pressure sensors and are intended for OEM applications. Available products listed below are Sensilica® die in open and closed bridge configurations, uncompensated Sensilica® packaged in TO-5 with mV output and compensated Sensilica pacakaged in TO-5 with volt/Digital output.
 
Product Description Product Image
Die Open Bridge Sensilica® Die

Order Part# ASDO-xxxx-A
Closed Bridge Sensilica® Die

Order Part# ASDC-xxxx-A
TO-5 Package Uncompensated Sensilica® Die in TO-5 package -mVolt Output

Order Part# ATA-KUx-xxx-AF
Compensated Sensilica® Die in TO-5 package -Volt/Digital Output

Order Part# ATA-KCx-xxx-AF
TO-46 Package Uncompensated Sensilica® Die in TO-46 package -mVolt Output

Order Part# ATA-KUx-xxx-AS
 
Sensilica® Die
 
 
The Sensilica® family of pressure sensors are extremely small (0.8mm x 0.8mm x 0.4mm) MEMS based piezoresistive pressure sensing devices that have been designed to provide the highest level of performance for die of this size. Sensilica is rated as most reliable against reference cavity stability and as having the highest burst pressure (>10x) among the MEMS piezoresistive pressure sensors available on market today.
 
Product Name Applications Data Sheet
ASDx-0015-A Low Pressure (15 PSIA)
    Altimeters, Barometric, Blood Pressure, HVAC		 Sensilica® Die
ASDx-0045-A
ASDx-0060-A
ASDx-0100-A 		Medium Pressure (30 PSIA to 100 PSIA)
    Engine Control, Tire Pressure, Scuba,
    Industrial Process Control (IPC)
ASDx-0200-A
ASDx-0300-A
ASDx-0500-A
ASDx-0750-A
ASDx-1000-A		 High Pressure (200 PSIA to 1000 PSIA)
    IPC, Diesel Engine Control, Natural Gas
 
[For ordering, please specify Open Bridge “x” = O Closed Bridge “x” = C]
 
Available sample options:
 
Gel Pack Description Data Sheet
Sample Pack 1 6 each of the 15 and 100 PSIA
2 each of 45, 60, 200, 300, 500, 750, 1000 PSIA		 Sensilica®
Open Bridge
Sample Packs		 Sensilica®
Closed Bridge
Sample Packs
Sample Pack 2 25 each of the 15 and 100 PSI
Sample Pack 3 Choose your own up to 50 pieces
 
Sensilica® in TO-5 Package
 
 
The TO-5 header package incorporates Apogee’s Sensilica® all-silicon sensor die which offers reliability and cost advantages over competitive sensors. The robust package’s 1/8” nickel tube connector is easy to apply and is well suited for a variety of industrial, medical, automotive and other commercial applications. Sensilica packaged in TO-5 headers is offered uncompensated as well as digitally compensated. The output for uncompensated Sensilica is in mVolt range. Compensated Sensilica carry an offset and FSO compensation over 0-85C range. Additionally, the compensated Sensilica is available in Analog(0-5V) as well as digital output formats.
 
Product Name Applications Data Sheet
ATA-KUx-015-AF Low Pressure (15 PSIA)
    Altimeters, Barometric, Blood Pressure, HVAC		 Sensilica® TO-5 Uncompensated mV Output
ATA-KUx-045-AF
ATA-KUx-060-AF
ATA-KUx-100-AF		 Medium Pressure (45 PSIA to 100 PSIA)
    Engine Control, Tire Pressure, Scuba,
    Industrial Process Control (IPC)
ATA-KCx-015-AF Low Pressure (15 PSIA)
    Altimeters, Barometric, Blood Pressure, HVAC		 Sensilica® TO-5 Compensated Volt/Digital Output
ATA-KCx-045-AF
ATA-KCx-060-AF
ATA-KCx-100-AF		 Medium Pressure (45 PSIA to 100 PSIA)
    Engine Control, Tire Pressure, Scuba,
    Industrial Process Control (IPC)
 
Sensilica® in TO-46 Package
 
 
The Sensilica® in TO-46 pressure sensor, is the smallest metal can type sensor available in market today, and comes in either with a flush-mount top cap, or with a 1/16” port-tube for easy connection. It incorporates Apogee’s Sensilica all silicon pressure sensing die, which is uniquely made with an embedded pressure reference cavity. The sensors are available in pressure ranges of 15, 30, 45, and 60 PSIA.
 
Product Name Applications Data Sheet
ATA-KUx-015-AS Low Pressure (15 PSIA)
    Altimeters, Barometric, Blood Pressure, HVAC		 Sensilica® TO-46 Uncompensated mV Output
ATA-KUx-030-AS
ATA-KUx-045-AS

ATA-KUx-060-AS		 Medium Pressure (45 PSIA to 60 PSIA)
    Engine Control, Tire Pressure, Scuba,
    Industrial Process Control (IPC)